Granted Patent
Utility
US 6,497,194 · App. 09/359,534
Focused particle beam systems and methods using a tilt column
Inventors:
Charles J. Libby, Billy W. Ward
Patented Case
View Patent ↗
Granted: Dec 24, 2002
Filed: Jul 22, 1999
Inventors
Charles J. Libby
Billy W. Ward
Assignee (at issue)
FEI Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.