Granted Patent
Utility
US 6,497,403 · App. 09/751,897
Semiconductor wafer holder
Inventor:
Michael J. Ries
Patented Case
View Patent ↗
Granted: Dec 24, 2002
Filed: Dec 28, 2000
Inventor
Michael J. Ries
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.