Granted Patent
Utility
US 6,497,800 · App. 09/685,934
Device providing electrical contact to the surface of a semiconductor workpiece during metal plating
Inventors:
Homayoun Talieh, Cyprian Emeka Uzoh, Bulent M. Basol
Patented Case
View Patent ↗
Granted: Dec 24, 2002
Filed: Oct 11, 2000
Inventors
Homayoun Talieh
Cyprian Emeka Uzoh
Bulent M. Basol
Assignee (at issue)
Nutool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.