Granted Patent
Utility
US 6,498,094 · App. 09/345,495
Method for providing a contact hole formed in an insulating film
Inventors:
Keisaku Nakao, Yoichi Sasai, Yuji Judai, Atsushi Noma
Patented Case
View Patent ↗
Granted: Dec 24, 2002
Filed: Jul 1, 1999
Inventors
Keisaku Nakao
Yoichi Sasai
Yuji Judai
Atsushi Noma
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.