Granted Patent
Utility
US 6,498,381 · App. 09/792,311
Semiconductor structures having multiple conductive layers in an opening, and methods for fabricating same
Inventors:
Patrick B. Halahan, Oleg Siniaguine
Patented Case
View Patent ↗
Granted: Dec 24, 2002
Filed: Feb 22, 2001
Inventors
Patrick B. Halahan
Oleg Siniaguine
Assignee (at issue)
Tru-Si Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.