Granted Patent
Utility
US 6,498,504 · App. 09/938,662
Wafer inspection device and wafer inspection method
Inventor:
Yuji Miyagi
Patented Case
View Patent ↗
Granted: Dec 24, 2002
Filed: Aug 27, 2001
Inventor
Yuji Miyagi
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.