Granted Patent
Utility
US 6,499,340 · App. 09/252,397
Scanning probe microscope and method of measuring geometry of sample surface with scanning probe microscope
Inventors:
Masatoshi Yasutake, Akira Inoue, Akihiko Homma, Ryuichi Matsuzaki, Gerd Binnig, Walter Haeberle
Patented Case
View Patent ↗
Granted: Dec 31, 2002
Filed: Feb 18, 1999
Inventors
Masatoshi Yasutake
Akira Inoue
Akihiko Homma
Ryuichi Matsuzaki
Gerd Binnig
Walter Haeberle
Assignees (at issue)
SEIKO INSTRUMENTS INC.
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.