Granted Patent
Utility
US 6,499,535 · App. 09/879,006
Temperature control of individual tools in a cluster tool system
Inventor:
Kenneth W. Cowans
Patented Case
View Patent ↗
Granted: Dec 31, 2002
Filed: Jun 13, 2001
Inventor
Kenneth W. Cowans
Assignee (at issue)
B/E AEROSPACE, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.