Granted Patent
Utility
US 6,500,348 · App. 09/782,394
Deep reactive ion etching process and microelectromechanical devices formed thereby
Inventors:
Troy Chase, John C. Christenson
Patented Case
View Patent ↗
Granted: Dec 31, 2002
Filed: Feb 14, 2001
Inventors
Troy Chase
John C. Christenson
Assignee (at issue)
Delphi Technologies
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.