Granted Patent
Utility
US 6,500,489 · App. 09/208,541
Low temperature CVD processes for preparing ferroelectric films using Bi alcoxides
Inventors:
Frank Hintermaier, Peter C. Van Buskirk, Jeffrey F. Roeder, Bryan C. Hendrix, Thomas H. Baum, Debra A. Desrochers
Patented Case
View Patent ↗
Granted: Dec 31, 2002
Filed: Dec 9, 1998
Inventors
Frank Hintermaier
Peter C. Van Buskirk
Jeffrey F. Roeder
Bryan C. Hendrix
Thomas H. Baum
Debra A. Desrochers
Assignees (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.