IP Library › Granted Patent US 6,500,588
Granted Patent Utility
US 6,500,588 · App. 10/125,853

Reticle cleaning without damaging pellicle

Inventor: Matthew E. Williams
Patented Case View Patent ↗
Granted: Dec 31, 2002 Filed: Apr 19, 2002
Inventor
Matthew E. Williams
Assignee (at issue)
Micron Technology, Inc.

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Quick Facts
Patent No.
US 6,500,588
App. No.
10/125,853
Filed
2002-04-19
Granted
2002-12-31
Kind
B2