Granted Patent
Utility
US 6,503,079 · App. 10/041,617
Substrate processing apparatus and method for manufacturing semiconductor device
Inventors:
Minoru Kogano, Yasuhiro Inokuchi, Makoto Sambu, Atsushi Moriya, Yasuo Kunii
Patented Case
View Patent ↗
Granted: Jan 7, 2003
Filed: Jan 10, 2002
Inventors
Minoru Kogano
Yasuhiro Inokuchi
Makoto Sambu
Atsushi Moriya
Yasuo Kunii
Assignee (at issue)
Hitachi Kokusai Electric Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.