Granted Patent
Utility
US 6,503,330 · App. 09/470,279
Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition
Inventors:
Ofer Sneh, Thomas E. Seidel, Carl Galewski
Patented Case
View Patent ↗
Granted: Jan 7, 2003
Filed: Dec 22, 1999
Inventors
Ofer Sneh
Thomas E. Seidel
Carl Galewski
Assignee (at issue)
Genus, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.