Granted Patent
Utility
US 6,503,409 · App. 09/579,824
Lithographic fabrication of nanoapertures
Inventor:
James G. Fleming
Patented Case
View Patent ↗
Granted: Jan 7, 2003
Filed: May 25, 2000
Inventor
James G. Fleming
Assignee (at issue)
Sandia Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.