Granted Patent
Utility
US 6,503,561 · App. 09/546,452
Liquid precursor mixtures for deposition of multicomponent metal containing materials
Inventors:
Yoshihide Senzaki, David A. Roberts, John Anthony Thomas Norman, Arthur Kenneth Hochberg
Patented Case
View Patent ↗
Granted: Jan 7, 2003
Filed: Apr 10, 2000
Inventors
Yoshihide Senzaki
David A. Roberts
John Anthony Thomas Norman
Arthur Kenneth Hochberg
Assignee (at issue)
Air Products and Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.