IP Library Granted Patent US 6,504,151
Granted Patent Utility
US 6,504,151 · App. 09/660,654

Wear coating applied to an atomic force probe tip

Inventors: Thomas O. Mitchell, Andreas Berghaus
Patented Case View Patent ↗
Granted: Jan 7, 2003 Filed: Sep 13, 2000
Inventors
Thomas O. Mitchell
Andreas Berghaus
Assignee (at issue)
FEI Company

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Quick Facts
Patent No.
US 6,504,151
App. No.
09/660,654
Filed
2000-09-13
Granted
2003-01-07
Kind
B1