IP Library Granted Patent US 6,504,164
Granted Patent Utility
US 6,504,164 · App. 09/740,662

Electron beam apparatus

Inventors: Akira Yonezawa, Seiji Morita, Mitsuyoshi Satou
Patented Case View Patent ↗
Granted: Jan 7, 2003 Filed: Dec 19, 2000
Inventors
Akira Yonezawa
Seiji Morita
Mitsuyoshi Satou
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 6,504,164
App. No.
09/740,662
Filed
2000-12-19
Granted
2003-01-07
Kind
B2