Granted Patent
Utility
US 6,504,247 · App. 10/058,997
Integrated having a self-aligned Cu diffusion barrier
Inventor:
Henry Chung
Patented Case
View Patent ↗
Granted: Jan 7, 2003
Filed: Jan 29, 2002
Inventor
Henry Chung
Assignee (at issue)
AlliedSignal, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.