Granted Patent
Utility
US 6,504,618 · App. 10/092,866
Method and apparatus for decreasing thermal loading and roughness sensitivity in a photoacoustic film thickness measurement system
Inventors:
Christopher Morath, Andrey Vertikov
Patented Case
View Patent ↗
Granted: Jan 7, 2003
Filed: Mar 6, 2002
Inventors
Christopher Morath
Andrey Vertikov
Assignee (at issue)
Rudolph Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.