Granted Patent
Utility
US 6,504,860 · App. 09/837,150
Purge monitoring system for gas discharge laser
Inventors:
Peter Clarke Newman, John Van Doorn, Darrel W. Fullen, William H. Clopton, Shahryar Rokni
Patented Case
View Patent ↗
Granted: Jan 7, 2003
Filed: Apr 18, 2001
Inventors
Peter Clarke Newman
John Van Doorn
Darrel W. Fullen
William H. Clopton
Shahryar Rokni
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.