Granted Patent
Utility
US 6,504,967 · App. 09/586,527
Passive alignment method and apparatus for fabricating a MEMS device
Inventors:
Ping Zhou, Robert Kehl Sink
Patented Case
View Patent ↗
Granted: Jan 7, 2003
Filed: Jun 2, 2000
Inventors
Ping Zhou
Robert Kehl Sink
Assignee (at issue)
Calient Networks, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.