Granted Patent
Utility
US 6,505,635 · App. 09/608,618
Lifting and rinsing a wafer
Inventors:
Michael Vogtmann, Terry L. Lentz
Patented Case
View Patent ↗
Granted: Jan 14, 2003
Filed: Jun 30, 2000
Inventors
Michael Vogtmann
Terry L. Lentz
Assignee (at issue)
Lam Research Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.