Granted Patent
Utility
US 6,506,252 · App. 09/778,265
Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition
Inventors:
Vadim Boguslavskiy, Alexander I. Gurary
Patented Case
View Patent ↗
Granted: Jan 14, 2003
Filed: Feb 7, 2001
Inventors
Vadim Boguslavskiy
Alexander I. Gurary
Assignee (at issue)
EMCORE CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.