Granted Patent
Utility
US 6,506,306 · App. 09/428,582
Method and an apparatus for treating wastewater from a chemical-mechanical polishing process used in chip fabrication
Inventors:
Jürgen Hammer, Andre Richter, Werner Kraus, Heinz-Dieter Petermann
Patented Case
View Patent ↗
Granted: Jan 14, 2003
Filed: Oct 28, 1999
Inventors
Jürgen Hammer
Andre Richter
Werner Kraus
Heinz-Dieter Petermann
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.