IP Library Granted Patent US 6,506,637
Granted Patent Utility
US 6,506,637 · App. 09/834,488

Method to form thermally stable nickel germanosilicide on SiGe

Inventors: Jer-Shen Maa, Douglas J. Tweet, Sheng Teng Hsu
Patented Case View Patent ↗
Granted: Jan 14, 2003 Filed: Apr 12, 2001
Inventors
Jer-Shen Maa
Douglas J. Tweet
Sheng Teng Hsu
Assignee (at issue)
Sharp Laboratories of America, Inc.

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Quick Facts
Patent No.
US 6,506,637
App. No.
09/834,488
Filed
2001-04-12
Granted
2003-01-14
Kind
B2