Granted Patent
Utility
US 6,506,647 · App. 09/961,059
Method for fabricating a semiconductor integrated circuit device
Inventors:
Kenichi Kuroda, Kozo Watanabe
Patented Case
View Patent ↗
Granted: Jan 14, 2003
Filed: Sep 24, 2001
Inventors
Kenichi Kuroda
Kozo Watanabe
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.