Granted Patent
Utility
US 6,506,674 · App. 09/964,628
Method of manufacturing a semiconductor integrated circuit device
Inventors:
Takenobu Ikeda, Masahiro Tadokoro, Masaru Izawa, Takashi Yunogami
Patented Case
View Patent ↗
Granted: Jan 14, 2003
Filed: Sep 28, 2001
Inventors
Takenobu Ikeda
Masahiro Tadokoro
Masaru Izawa
Takashi Yunogami
Assignees (at issue)
HITACHI, LTD.
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.