Granted Patent
Utility
US 6,506,676 · App. 10/033,509
Method of manufacturing semiconductor devices with titanium aluminum nitride work function
Inventors:
Dae-Gyu Park, Tae-Ho Cha, Se-Aug Jang, Heung-Jae Cho, Tae-Kyun Kim, Kwan-Yong Lim, In-Seok Yeo, Jin Won Park
Patented Case
View Patent ↗
Granted: Jan 14, 2003
Filed: Dec 27, 2001
Inventors
Dae-Gyu Park
Tae-Ho Cha
Se-Aug Jang
Heung-Jae Cho
Tae-Kyun Kim
Kwan-Yong Lim
In-Seok Yeo
Jin Won Park
Assignee (at issue)
SK hynix Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.