IP Library Granted Patent US 6,507,138
Granted Patent Utility
US 6,507,138 · App. 09/615,008

Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement

Inventors: M. Steven Rodgers, Samuel Lee Miller
Patented Case View Patent ↗
Granted: Jan 14, 2003 Filed: Jul 11, 2000
Inventors
M. Steven Rodgers
Samuel Lee Miller
Assignee (at issue)
Sandia Corporation

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Quick Facts
Patent No.
US 6,507,138
App. No.
09/615,008
Filed
2000-07-11
Granted
2003-01-14
Kind
B1