IP Library Granted Patent US 6,507,983
Granted Patent Utility
US 6,507,983 · App. 09/192,163

Method of making tunable thin film acoustic resonators

Inventors: Richard C. Ruby, Paul Merchant
Patented Case View Patent ↗
Granted: Jan 21, 2003 Filed: Nov 13, 1998
Inventors
Richard C. Ruby
Paul Merchant
Assignee (at issue)
Agilent Technologies, Inc.

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Quick Facts
Patent No.
US 6,507,983
App. No.
09/192,163
Filed
1998-11-13
Granted
2003-01-21
Kind
B1