IP Library › Granted Patent US 6,508,694
Granted Patent Utility
US 6,508,694 · App. 09/761,336

Multi-zone pressure control carrier

Inventor: Nikolay Korovin
Patented Case View Patent ↗
Granted: Jan 21, 2003 Filed: Jan 16, 2001
Inventor
Nikolay Korovin
Assignee (at issue)
SpeedFam-IPEC Corporation

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Quick Facts
Patent No.
US 6,508,694
App. No.
09/761,336
Filed
2001-01-16
Granted
2003-01-21
Kind
B2