Granted Patent
Utility
US 6,509,201 · App. 09/832,697
Method and apparatus for monitoring wafer stress
Inventor:
Marilyn I. Wright
Patented Case
View Patent ↗
Granted: Jan 21, 2003
Filed: Apr 11, 2001
Inventor
Marilyn I. Wright
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.