Granted Patent
Utility
US 6,509,229 · App. 09/850,484
Method for forming self-aligned contacts using consumable spacers
Inventors:
Fei Wang, Ramkumar Subramanian, Yu Sun
Patented Case
View Patent ↗
Granted: Jan 21, 2003
Filed: May 7, 2001
Inventors
Fei Wang
Ramkumar Subramanian
Yu Sun
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.