Granted Patent
Utility
US 6,509,240 · App. 09/852,579
Angle implant process for cellular deep trench sidewall doping
Inventors:
Liping Ren, Srikant Sridevan
Patented Case
View Patent ↗
Granted: Jan 21, 2003
Filed: May 10, 2001
Inventors
Liping Ren
Srikant Sridevan
Assignee (at issue)
International Rectifier Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.