Granted Patent
Utility
US 6,509,254 · App. 09/680,053
Method of forming electrode structure and method of fabricating semiconductor device
Inventors:
Michikazu Matsumoto, Naohisa Sengoku
Patented Case
View Patent ↗
Granted: Jan 21, 2003
Filed: Oct 5, 2000
Inventors
Michikazu Matsumoto
Naohisa Sengoku
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.