Granted Patent
Utility
US 6,509,258 · App. 09/941,762
Etch stop in damascene interconnect structure and method of making
Inventor:
Paul A. Farrar
Patented Case
View Patent ↗
Granted: Jan 21, 2003
Filed: Aug 30, 2001
Inventor
Paul A. Farrar
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.