Granted Patent
Utility
US 6,509,271 · App. 09/621,566
Manufacturing method of semiconductor device
Inventor:
Migaku Kobayashi
Patented Case
View Patent ↗
Granted: Jan 21, 2003
Filed: Jul 21, 2000
Inventor
Migaku Kobayashi
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.