Granted Patent
Utility
US 6,509,568 · App. 09/431,441
Electrostatic deflector for electron beam exposure apparatus
Inventors:
Yoshihisa Ooae, Hitoshi Tanaka, Takeshi Haraguchi, Kazuto Ashiwara, Tomohiko Abe, Ryoji Kato
Patented Case
View Patent ↗
Granted: Jan 21, 2003
Filed: Nov 1, 1999
Inventors
Yoshihisa Ooae
Hitoshi Tanaka
Takeshi Haraguchi
Kazuto Ashiwara
Tomohiko Abe
Ryoji Kato
Assignee (at issue)
Advantest Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.