Granted Patent
Utility
US 6,509,569 · App. 09/690,425
Deflection arrangement for separating two particle beams
Inventor:
Jürgen Frosien
Patented Case
View Patent ↗
Granted: Jan 21, 2003
Filed: Oct 17, 2000
Inventor
Jürgen Frosien
Assignee (at issue)
Advantest Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.