Granted Patent
Utility
US 6,509,577 · App. 09/709,975
Systems and methods for exposing substrate periphery
Inventors:
Dikran Babikian, Larry Stark, Bryan Wade
Patented Case
View Patent ↗
Granted: Jan 21, 2003
Filed: Nov 10, 2000
Inventors
Dikran Babikian
Larry Stark
Bryan Wade
Assignee (at issue)
ASML US, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.