Granted Patent
Utility
US 6,509,604 · App. 09/491,457
Nitridation barriers for nitridated tunnel oxide for circuitry for flash technology and for LOCOS/STI isolation
Inventors:
Tuan Pham, Mark T. Ramsbey, Yu Sun, Chi Chang
Patented Case
View Patent ↗
Granted: Jan 21, 2003
Filed: Jan 26, 2000
Inventors
Tuan Pham
Mark T. Ramsbey
Yu Sun
Chi Chang
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.