Granted Patent
Utility
US 6,509,623 · App. 09/967,115
Microelectronic air-gap structures and methods of forming the same
Inventor:
Bin Zhao
Patented Case
View Patent ↗
Granted: Jan 21, 2003
Filed: Sep 28, 2001
Inventor
Bin Zhao
Assignee (at issue)
Newport Fab, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.