Granted Patent
Utility
US 6,509,751 · App. 09/528,064
Planarizer for a semiconductor contactor
Inventors:
Gaetan L. Mathieu, Benjamin N. Eldridge, Gary W. Grube
Patented Case
View Patent ↗
Granted: Jan 21, 2003
Filed: Mar 17, 2000
Inventors
Gaetan L. Mathieu
Benjamin N. Eldridge
Gary W. Grube
Assignee (at issue)
FormFactor, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.