Granted Patent
Utility
US 6,509,951 · App. 09/777,697
Lithographic projection apparatus having a temperature controlled heat shield
Inventors:
Erik Roelof Loopstra, Yim-Bun Patrick Kwan, Marcel Johannus Elisabeth Hubertus Muitjens, Sonja T. De Vrieze-Voorn
Patented Case
View Patent ↗
Granted: Jan 21, 2003
Filed: Feb 7, 2001
Inventors
Erik Roelof Loopstra
Yim-Bun Patrick Kwan
Marcel Johannus Elisabeth Hubertus Muitjens
Sonja T. De Vrieze-Voorn
Assignee (at issue)
ASML NETHERLANDS B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.