Granted Patent
Utility
US 6,509,952 · App. 09/575,997
Method and system for selective linewidth optimization during a lithographic process
Inventors:
Pradeep K. Govil, James Tsacoyeanes
Patented Case
View Patent ↗
Granted: Jan 21, 2003
Filed: May 23, 2000
Inventors
Pradeep K. Govil
James Tsacoyeanes
Assignee (at issue)
Silicon Valley Group, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.