Granted Patent
Utility
US 6,509,955 · App. 09/858,711
Lens system for maskless photolithography
Inventors:
Wenhui Mei, Takashi Kanatake
Patented Case
View Patent ↗
Granted: Jan 21, 2003
Filed: May 16, 2001
Inventors
Wenhui Mei
Takashi Kanatake
Assignee (at issue)
Ball Semiconductor Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.