Granted Patent
Utility
US 6,510,697 · App. 09/878,160
System and method for recovering from a power failure in a cryopump
Inventors:
Maureen C. Buonpane, Philip D. Acomb, Brian Foley, Michael J. Eacobacci, Stephen J. Yamartino, Robert M. Patterson
Patented Case
View Patent ↗
Granted: Jan 28, 2003
Filed: Jun 7, 2001
Inventors
Maureen C. Buonpane
Philip D. Acomb
Brian Foley
Michael J. Eacobacci
Stephen J. Yamartino
Robert M. Patterson
Assignee (at issue)
Helix Technology Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.