Granted Patent
Utility
US 6,512,207 · App. 09/914,113
Apparatus and method for the treatment of substrates
Inventors:
Peter Dress, Uwe Dietze, Jakob Szekeresch, Robert Weihing
Patented Case
View Patent ↗
Granted: Jan 28, 2003
Filed: Aug 23, 2001
Inventors
Peter Dress
Uwe Dietze
Jakob Szekeresch
Robert Weihing
Assignee (at issue)
Steag Hamatech AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.