Granted Patent
Utility
US 6,512,265 · App. 10/106,364
Method of fabricating semiconductor device
Inventors:
Sumito Numazawa, Yoshito Nakazawa, Masayoshi Kobayashi, Satoshi Kudo, Yasuo Imai, Sakae Kubo, Takashi Shigematsu, Akihiro Ohnishi, Kozo Uesawa, Kentaro Oishi
Patented Case
View Patent ↗
Granted: Jan 28, 2003
Filed: Mar 27, 2002
Inventors
Sumito Numazawa
Yoshito Nakazawa
Masayoshi Kobayashi
Satoshi Kudo
Yasuo Imai
Sakae Kubo
Takashi Shigematsu
Akihiro Ohnishi
Kozo Uesawa
Kentaro Oishi
Assignees (at issue)
HITACHI, LTD.
Hitachi Ulsi Systems Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.