Granted Patent
Utility
US 6,512,266 · App. 09/902,830
Method of fabricating SiO2 spacers and annealing caps
Inventors:
Sadanand V. Deshpande, Bruce B. Doris, Rajarao Jammy, William H. Ma
Patented Case
View Patent ↗
Granted: Jan 28, 2003
Filed: Jul 11, 2001
Inventors
Sadanand V. Deshpande
Bruce B. Doris
Rajarao Jammy
William H. Ma
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.